Sputtering preparation of ferroelectric PLZT thin films and their optical applications.

Sputtering preparation of ferroelectric PLZT thin films and their optical applications. Research Abstract Details 

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Sputtering preparation of ferroelectric PLZT thin films and their optical applications. Abstract Text:

H Adachi,K Wasa,

Preparation of epitaxial PLZT thin films on sapphire has been investigated, and excellent ferroelectric properties such as piezoelectricity and electrooptic effect with high transparency were obtained in thin films. Moreover, a preparation process was developed involving the multitarget sputtering method, and strict control of film composition and epitaxial growth with the buffer layer of graded composition were performed. Using these PLZT thin films, some optical applications, including an acoustooptic deflector and an electrooptic guided-light switch, are shown.

Sputtering preparation of ferroelectric PLZT thin films and their optical applications. Publishing Authors By Initials

H Adachi,K Wasa,

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Sputtering preparation of ferroelectric PLZT thin films and their optical applications. Journal Published:

PUBLICATION TYPE: Journal Article

Journal: IEEE transactions on ultrasonics, ferroelectrics,

VOLUME: 38

Page Numbers: 645-55

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ISSN: 0885-3010

DAY: 12

MONTH: 02

YEAR: 1991

Sputtering preparation of ferroelectric PLZT thin films and their optical applications. Information

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LANGUAGE: eng

NlmUniqueID: 9882735

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Grant and Affiliation Information for Sputtering preparation of ferroelectric PLZT thin films and their optical applications.

AFFILIATION: Matsushita Electr. Ind. Co. Ltd., Osaka.

Country: United States

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MEDLINETA: IEEE Trans Ultrason Ferroelect

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