Secondary ion quadrupole mass spectrometer for depth profiling-design and performance evaluation.

Secondary ion quadrupole mass spectrometer for depth profiling-design and performance evaluation. Research Abstract Details 

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Secondary ion quadrupole mass spectrometer for depth profiling-design and performance evaluation. Journal Published:

PUBLICATION TYPE: Journal Article

Journal: The Review of scientific instruments

VOLUME: 49

Page Numbers: 477

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ISSN: 0034-6748

DAY: 13

MONTH: Apr

YEAR: 1978

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LANGUAGE: eng

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Grant and Affiliation Information for Secondary ion quadrupole mass spectrometer for depth profiling-design and performance evaluation.

AFFILIATION: RCA Laboratories, Princeton, New Jersey 08540.

Country: United States

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MEDLINETA: Rev Sci Instrum

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