Real-time characterization of film growth on transparent substrates by rotating-compensator multichannel ellipsometry.

Real-time characterization of film growth on transparent substrates by rotating-compensator multichannel ellipsometry. Research Abstract Details 

Research Abstract Table of Contents

Jump to the:

Real-time characterization of film growth on transparent substrates by rotating-compensator multichannel ellipsometry. Abstract Text:

J Lee,R W Collins,

A multichannel spectroscopic ellipsometer in the fixed-polarizer-sample-rotating-compensator-fixed-analyzer (PSC(R)A) configuration has been developed and applied for real-time characterization of the nucleation and growth of thin films on transparent substrates. This rotating-compensator design overcomes the major disadvantages of the multichannel ellipsometer in the rotating-polarizer-sample-fixed-analyzer (P(R)SA) configuration while retaining its high speed and precision for the characterization of thin-film processes in real time. The advantages of the PSC(R)A configuration include (i) its high accuracy and precision for the detection of low-ellipticity polarization states that are generated upon reflection of linearly polarized light from transparent film-substrate systems, and (ii) the ability to characterize depolarization of the reflected light, an effect that leads to errors in ellipticity when measured with the P(R)SA configuration. A comparison of the index of refraction spectra for a glass substrate obtained in the real-time PSC(R)A mode in 2.5 s and in the ex situ fixed-polarizer-fixed-compensator-sample-rotating-analyzer (PCSA(R)) mode in ~10 min show excellent agreement, with a standard deviation between the two data sets of 8 x 10(-4), computed over the photon energy range from 1.5 to 3.5 eV. First, we describe the PSC(R)A ellipsometer calibration procedures developed specifically for transparent substrates. In addition, we describe the application of the multichannel PSC(R)A instrument for a study of thin-film diamond nucleation and growth on glass in a low-temperature microwave plasma-enhanced chemical vapor deposition process.

Real-time characterization of film growth on transparent substrates by rotating-compensator multichannel ellipsometry. Publishing Authors By Initials

J Lee,RW Collins,

For similar abstracts research abstracts see: abstracts research

PUBMED ID PMID:

MEDLINE DATE:

Real-time characterization of film growth on transparent substrates by rotating-compensator multichannel ellipsometry. Journal Published:

PUBLICATION TYPE: Journal Article

Journal: Applied optics

VOLUME: 37

Page Numbers: 4230-8

Journal Abbreviation:

ISSN: 0003-6935

DAY: 1

MONTH: Jul

YEAR: 1998

Real-time characterization of film growth on transparent substrates by rotating-compensator multichannel ellipsometry. Information

Number of References:

LANGUAGE: eng

NlmUniqueID: 247660

Real-time characterization of film growth on transparent substrates by rotating-compensator multichannel ellipsometry. Keywords Mesh Terms:

KEYWORDS:

MESH TERMS:

Chemical & Substance for Abstract: Real-time characterization of film growth on transparent substrates by rotating-compensator multichannel ellipsometry. Information

Substance Name:

Registry Number:

Grant and Affiliation Information for Real-time characterization of film growth on transparent substrates by rotating-compensator multichannel ellipsometry.

AFFILIATION:

Country: United States

AGENCY:

GRANT:

ACRONYM:

MEDLINETA: Appl Opt

REFSOURCE:

DATABASENAME:

ACCESSION NUMBER:

Number Hits: 0

Real-time characterization of film growth on transparent substrates by rotating-compensator multichannel ellipsometry Related Publications

• 2-D Mathematical Models of Tumor-induced Angiogenesis.
• A mixture model of discontinuous development in heavy drinking from ages 18 to 30: the role of college enrollment.
• A multidimensional developmental model of alcohol use during emerging adulthood.
• A non-lethal technique for detecting the chytrid fungus Batrachochytrium dendrobatidis on tadpoles.
• Aptamer-based detection and quantitative analysis of ricin using affinity probe capillary electrophoresis.
• Bead-assisted displacement immunoassay for staphylococcal enterotoxin B on a microchip.
• Bone regeneration in the rat mandible with bone morphogenetic protein-2: a comparison of two carriers.
• Clinical epidemiology of parathyroidectomy in hemodialysis patients: the USRDS waves 1, 3, and 4 study.
• Domain-swapped dimerization of the HIV-1 capsid C-terminal domain.
• Engineering better wheelchairs to enhance community participation.
• Exploring the limits of RF shimming for high-field MRI of the human head.
• First case of ranavirus-associated morbidity and mortality in natural populations of the South American frog Atelognathus patagonicus.
• Gene chip analyses reveal differential genetic responses to iron deficiency in rat duodenum and jejunum.
• Genomic profiling of hormone-naïve lymph node metastases in patients with prostate cancer.
• High school drug use predicts job-related outcomes at age 29.
• Increasing ankle strength to improve gait and function in children with cerebral palsy: a pilot study.
• Infection-related hospitalization rates in pediatric versus adult patients with end-stage renal disease in the United States.
• Live vaccines for human metapneumovirus designed by reverse genetics.
• Longitudinal study of racial and ethnic differences in developing end-stage renal disease among aged medicare beneficiaries.
• Platelet activation and "crossover appeal": Rab and Rho families united by common links to serotonin.
• Positive and negative regulation of Tetrahymena telomerase holoenzyme.
• Regulation of NF-kappaB-dependent gene expression by the POU domain transcription factor Oct-1.
• Residues of the human nuclear vitamin D receptor that form hydrogen bonding interactions with the three hydroxyl groups of 1alpha,25-dihydroxyvitamin D3.
• Se08 students perspectives of a surgical education program.
• Sh10 teaching and learning anatomy in melbourne over 150 years.
• Simultaneous microchip enzymatic measurements of blood lactate and glucose.
• Stretched polymers for X-ray linear and circular polarization.
• Telomerase RNA level limits telomere maintenance in X-linked dyskeratosis congenita.
• Update of the Anopheles gambiae PEST genome assembly.
• VectorBase: a home for invertebrate vectors of human pathogens.