Quality improvement of environmental secondary electron detector signal using helium gas in variable pressure scanning electron microscopy.

Quality improvement of environmental secondary electron detector signal using helium gas in variable pressure scanning electron microscopy. Research Abstract Details 

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Quality improvement of environmental secondary electron detector signal using helium gas in variable pressure scanning electron microscopy. Abstract Text:

Eisaku Oho,Kazuhiko Suzuki,Sadao Yamazaki,Eisaku Oho,Kazuhiko Suzuki,Sadao Yamazaki,

The quality of the image signal obtained from the environmental secondary electron detector (ESED) employed in a variable pressure (VP) SEM can be dramatically improved by using helium gas. The signal-to-noise ratio (SNR) increases gradually in the range of the pressures that can be used in our modified SEM. This method is especially useful in low-voltage VP SEM as well as in a variety of SEM operating conditions, because helium gas can more or less maintain the amount of unscattered primary electrons. In order to measure the SNR precisely, a digital scan generator system for obtaining two images with identical views is employed as a precondition.

Quality improvement of environmental secondary electron detector signal using helium gas in variable pressure scanning electron microscopy. Publishing Authors By Initials

E Oho,K Suzuki,S Yamazaki,E Oho,K Suzuki,S Yamazaki,

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Quality improvement of environmental secondary electron detector signal using helium gas in variable pressure scanning electron microscopy. Journal Published:

PUBLICATION TYPE: Journal Article

Journal: Scanning

VOLUME: 29

Page Numbers: 225-9

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ISSN: 0161-0457

DAY: 15

MONTH: 10

YEAR: 2007

Quality improvement of environmental secondary electron detector signal using helium gas in variable pressure scanning electron microscopy. Information

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LANGUAGE: eng

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Grant and Affiliation Information for Quality improvement of environmental secondary electron detector signal using helium gas in variable pressure scanning electron microscopy.

AFFILIATION: Department of Electrical Engineering, Kogakuin University, Tokyo, Japan. oho@cc.kogakuin.ac.jp

Country: United States

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MEDLINETA: Scanning

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