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Preparation of (001)-oriented Pb(Zr,Ti)O(3) thin films and their piezoelectric applications.

Preparation of (001)-oriented Pb(Zr,Ti)O(3) thin films and their piezoelectric applications. Research Abstract Details 

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  • Preparation of (001)-oriented Pb(Zr,Ti)O(3) thin films and their piezoelectric applications. Abstract Text:

    e fujiiE Fujii,r takayamaR Takayama,k nomuraK Nomura,a murataA Murata,t hirasawaT Hirasawa,a tomozawaA Tomozawa,s fujiiS Fujii,t kamadaT Kamada,h toriiH Torii,eiji fujiiEiji Fujii,ryoichi takayamaRyoichi Takayama,kouji nomuraKouji Nomura,akiko murataAkiko Murata,taku hirasawaTaku Hirasawa,atsushi tomozawaAtsushi Tomozawa,satoru fujiiSatoru Fujii,takeshi kamadaTakeshi Kamada,hideo toriiHideo Torii,

    Preparation of (001)-oriented Pb(Zr,Ti)O(3) (PZT) thin films and their applications to a sensor and actuators were investigated. These thin films, which have a composition close to the morphotropic phase boundary, were epitaxially grown on (100)MgO single-crystal substrates by RF magnetron sputtering. These (001)-oriented PZT thin films could be obtained on various kinds of substrates, such as glass and Si, by introducing (100)-oriented MgO buffer layers. In addition, the (001) oriented PZT thin films could be obtained on Si substrates without buffer layers by optimizing the sputtering conditions. All of these thin films showed excellent piezoelectric properties without the need for poling treatment. The PZT thin films on the MgO substrates had a high piezoelectric coefficient, d(31), of -100 pm/V, and an extremely low relative dielectric constant, epsilonr, of 240. The PZT thin films on Si substrate had a very high d(31) of -150 pm/V and an epsilonr = 700. These PZT thin films were applied to an angular rate sensor with a tuning fork in a car navigation system, to a dual-stage actuator for positioning the magnetic head of a high-density hard disk drive, and to an actuator for an inkjet printer head for industrial on-demand printers.

    Preparation of (001)-oriented Pb(Zr,Ti)O(3) thin films and their piezoelectric applications. Publishing Authors By Initials

    e fujiiE Fujii,r takayamaR Takayama,k nomuraK Nomura,a murataA Murata,t hirasawaT Hirasawa,a tomozawaA Tomozawa,s fujiiS Fujii,t kamadaT Kamada,h toriiH Torii,e fujiiE Fujii,r takayamaR Takayama,k nomuraK Nomura,a murataA Murata,t hirasawaT Hirasawa,a tomozawaA Tomozawa,s fujiiS Fujii,t kamadaT Kamada,h toriiH Torii,

    For similar abstracts research abstracts see: abstracts research

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    Preparation of (001)-oriented Pb(Zr,Ti)O(3) thin films and their piezoelectric applications. Journal Published:

    PUBLICATION TYPE: Journal Article

    Journal: IEEE transactions on ultrasonics, ferroelectrics,

    VOLUME: 54

    Page Numbers: 2431

    Journal Abbreviation:

    ISSN: 0885-3010

    DAY: 15

    MONTH: Dec

    YEAR: 2007

    Preparation of (001)-oriented Pb(Zr,Ti)O(3) thin films and their piezoelectric applications. Information

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    LANGUAGE: eng

    NlmUniqueID: 9882735

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    Country: United States

    United States Research PublicationUnited States Research Publication

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    MEDLINETA: IEEE Trans Ultrason Ferroelect

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