Multichannel Mueller matrix ellipsometer for real-time spectroscopy of anisotropic surfaces and films.

Multichannel Mueller matrix ellipsometer for real-time spectroscopy of anisotropic surfaces and films. Research Abstract Details 

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Multichannel Mueller matrix ellipsometer for real-time spectroscopy of anisotropic surfaces and films. Abstract Text:

J Lee,J Koh,R W Collins,

A multichannel ellipsometer in the dual-rotating-compensator configuration has been developed for potential applications in real-time Mueller matrix spectroscopy of anisotropic surfaces and films. This instrument provides spectra (1.7-5.3 eV) in all 16 elements of the unnormalized Mueller matrix M of a film-substrate system with a minimum overall data acquisition time of t(a) = 0.25 s. We have applied this instrument first for high-precision determination of spectra in M with t(a) = 2.5 s for a microscopically sculptured film.

Multichannel Mueller matrix ellipsometer for real-time spectroscopy of anisotropic surfaces and films. Publishing Authors By Initials

J Lee,J Koh,RW Collins,

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Multichannel Mueller matrix ellipsometer for real-time spectroscopy of anisotropic surfaces and films. Journal Published:

PUBLICATION TYPE: Journal Article

Journal: Optics letters

VOLUME: 25

Page Numbers: 1573-5

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ISSN: 0146-9592

DAY: 1

MONTH: Nov

YEAR: 2000

Multichannel Mueller matrix ellipsometer for real-time spectroscopy of anisotropic surfaces and films. Information

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LANGUAGE: eng

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Country: United States

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