Microcantilever actuation via periodic internal heating.

Microcantilever actuation via periodic internal heating. Research Abstract Details 

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Microcantilever actuation via periodic internal heating. Abstract Text:

Jungchul Lee,William P King,Jungchul Lee,William P King,

This paper reports electrothermal actuation of silicon microcantilevers having integrated resistive heaters. Periodic electrical excitation induced periodic resistive heating in the cantilever, while the cantilever deflection was monitored with a photodetector. Excitation was either at the cantilever resonant frequency, f(0), f(0)2, or f(0)3. When the time averaged maximum cantilever temperature was 174 degrees C, the cantilever out-of-plane actuation amplitude was 484 nm near the cantilever resonance frequency of 24.9 kHz. This actuation was sufficiently large to operate the cantilever in intermittent contact mode and scan a calibration grating of height of 20 nm.

Microcantilever actuation via periodic internal heating. Publishing Authors By Initials

J Lee,WP King,J Lee,WP King,

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Microcantilever actuation via periodic internal heating. Journal Published:

PUBLICATION TYPE: Journal Article

Journal: The Review of scientific instruments

VOLUME: 78

Page Numbers: 126102

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ISSN: 0034-6748

DAY: 31

MONTH: Dec

YEAR: 2007

Microcantilever actuation via periodic internal heating. Information

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LANGUAGE: eng

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Grant and Affiliation Information for Microcantilever actuation via periodic internal heating.

AFFILIATION: Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, USA.

Country: United States

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MEDLINETA: Rev Sci Instrum

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