Measurement of surface features beyond the diffraction limit with an imaging ellipsometer.

Measurement of surface features beyond the diffraction limit with an imaging ellipsometer. Research Abstract Details 

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Measurement of surface features beyond the diffraction limit with an imaging ellipsometer. Abstract Text:

Qiwen Zhan,James R Leger,

We report a sensitive surface and feature measurement technique that uses a novel imaging ellipsometer. Polarization signatures from unresolved subwavelength structures are utilized as a sensitive measure of linewidth. A focused beam rigorous coupled wave analysis method is developed to simulate the polarization effects from isolated subwavelength structures. Experimental results show that this technique can accurately measure linewidths down to 100 nm with an imaging system whose diffraction-limited resolution is 500 nm. The accuracy of our measurements is ~10 nm for lines that are broader than 100 nm.

Measurement of surface features beyond the diffraction limit with an imaging ellipsometer. Publishing Authors By Initials

Q Zhan,JR Leger,

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Measurement of surface features beyond the diffraction limit with an imaging ellipsometer. Journal Published:

PUBLICATION TYPE: Journal Article

Journal: Optics letters

VOLUME: 27

Page Numbers: 821-3

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ISSN: 0146-9592

DAY: 15

MONTH: May

YEAR: 2002

Measurement of surface features beyond the diffraction limit with an imaging ellipsometer. Information

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LANGUAGE: eng

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Country: United States

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MEDLINETA: Opt Lett

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