Fabrication of x-ray zone plates by surface-plasma chemical vapor deposition.

Fabrication of x-ray zone plates by surface-plasma chemical vapor deposition. Research Abstract Details 

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Fabrication of x-ray zone plates by surface-plasma chemical vapor deposition. Abstract Text:

K M Golant,S V Lavrishchev,A V Popov,I A Artyukov,R M Feshchenko,A N Mitrofanov,A V Vinogradov,K M Golant,S V Lavrishchev,A V Popov,I A Artyukov,R M Feshchenko,A N Mitrofanov,A V Vinogradov,

A new cost-efficient sputter-slice technology for hard x-ray (10-30 keV) Fresnel zone plates fabrication, imposing no limitation to aspect ratio, is proposed. By means of a plasma chemical process, SiO(2)/Si(1-x)Ge(x)O(2) glassy film multilayer structures are deposited on a lateral surface of a silica rod, outermost layers being as thin as 100 nm. It has been shown by numerical simulation that for x=0.2 germanium fraction, 100-300 microm zone plate thickness and the number of zones of about 1000, first order diffraction efficiency as high as 20%-30% at the energy of approximately 20 keV can be achieved.

Fabrication of x-ray zone plates by surface-plasma chemical vapor deposition. Publishing Authors By Initials

KM Golant,SV Lavrishchev,AV Popov,IA Artyukov,RM Feshchenko,AN Mitrofanov,AV Vinogradov,KM Golant,SV Lavrishchev,AV Popov,IA Artyukov,RM Feshchenko,AN Mitrofanov,AV Vinogradov,

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Fabrication of x-ray zone plates by surface-plasma chemical vapor deposition. Journal Published:

PUBLICATION TYPE: Research Support, Non-U.S. Gov

Journal: Applied optics

VOLUME: 46

Page Numbers: 5964-6

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ISSN: 0003-6935

DAY: 10

MONTH: Aug

YEAR: 2007

Fabrication of x-ray zone plates by surface-plasma chemical vapor deposition. Information

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LANGUAGE: eng

NlmUniqueID: 247660

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Grant and Affiliation Information for Fabrication of x-ray zone plates by surface-plasma chemical vapor deposition.

AFFILIATION: Fiber Optics Research Center, RAS, 38 Vavilov Street, 119333 Moscow, Russia. golant@fo.gpi.ru

Country: United States

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MEDLINETA: Appl Opt

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