Dissociative adsorption of methyl chloride on Si(001) studied by scanning tunneling microscopy.

Dissociative adsorption of methyl chloride on Si(001) studied by scanning tunneling microscopy. Research Abstract Details 

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Dissociative adsorption of methyl chloride on Si(001) studied by scanning tunneling microscopy. Abstract Text:

Axel Woelke,Soichi Imanaka,Shinichi Watanabe,Seishiro Goto,Michihiro Hashinokuchi,Michio Okada,Toshio Kasai,Axel Woelke,Soichi Imanaka,Shinichi Watanabe,Seishiro Goto,Michihiro Hashinokuchi,Michio Okada,Toshio Kasai,

Chemical reactions of methyl chloride (CH3Cl) on a clean Si(001) surface at approximately 300 K are studied by means of scanning tunneling microscopy (STM) under ultra-high-vacuum conditions. The features appearing in the STM images are identified with the possible products of dissociated CH3 and Cl, and their distribution is also evaluated as well as the development of their distribution with increasing CH(3)Cl doses. The amount of Cl atoms found on the surface is approximately twice as large as that of the CH3 molecules. This leads to the conclusion that dissociative adsorption of CH3Cl on Si occurs in different processes: CH3Cl(precursor) --> CH3(ad) + Cl(ad) and CH3Cl(precursor) --> CH3(gas) + Cl(ad).

Dissociative adsorption of methyl chloride on Si(001) studied by scanning tunneling microscopy. Publishing Authors By Initials

A Woelke,S Imanaka,S Watanabe,S Goto,M Hashinokuchi,M Okada,T Kasai,A Woelke,S Imanaka,S Watanabe,S Goto,M Hashinokuchi,M Okada,T Kasai,

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Dissociative adsorption of methyl chloride on Si(001) studied by scanning tunneling microscopy. Journal Published:

PUBLICATION TYPE: Research Support, Non-U.S. Gov

Journal: Journal of electron microscopy

VOLUME: 54 Suppl 1

Page Numbers: i21-4

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ISSN: 1477-9986

DAY: 13

MONTH: 09

YEAR: 2005

Dissociative adsorption of methyl chloride on Si(001) studied by scanning tunneling microscopy. Information

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LANGUAGE: eng

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Grant and Affiliation Information for Dissociative adsorption of methyl chloride on Si(001) studied by scanning tunneling microscopy.

AFFILIATION: Department of Chemistry, Graduate School of Science, Osaka University, Toyonaka, Osaka 560-0043, Japan.

Country: Japan

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MEDLINETA: J Electron Microsc (Tokyo)

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