Direct fabrication of microgratings in fused quartz by laser-induced plasma-assisted ablation with a KrF excimer laser.

Direct fabrication of microgratings in fused quartz by laser-induced plasma-assisted ablation with a KrF excimer laser. Research Abstract Details 

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Direct fabrication of microgratings in fused quartz by laser-induced plasma-assisted ablation with a KrF excimer laser. Abstract Text:

J Zhang,K Sugioka,K Midorikawa,

We report precision microfabrication of fused quartz by laser ablation with a conventional UV laser for what is believed to be the first time. A high-quality micrograting structure is fabricated in fused quartz by a novel technique of laser-induced plasma-assisted ablation with a single KrF excimer laser (248 nm). The plasma generated from a metal target by laser irradiation effectively assists in ablation of the fused-quartz substrate by the same laser beam, although the laser beam is transparent to the substrate. A grating with a period of 1.06 mum is achieved by use of a phase mask. We can control the grating depth to 300 nm by changing the pulse number. This technique permits high-quality microfabrication of electronic and optoelectronic devices based on fused quartz and related silicate materials by use of a conventional UV laser.

Direct fabrication of microgratings in fused quartz by laser-induced plasma-assisted ablation with a KrF excimer laser. Publishing Authors By Initials

J Zhang,K Sugioka,K Midorikawa,

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Direct fabrication of microgratings in fused quartz by laser-induced plasma-assisted ablation with a KrF excimer laser. Journal Published:

PUBLICATION TYPE: Journal Article

Journal: Optics letters

VOLUME: 23

Page Numbers: 1486-8

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ISSN: 0146-9592

DAY: 15

MONTH: Sep

YEAR: 1998

Direct fabrication of microgratings in fused quartz by laser-induced plasma-assisted ablation with a KrF excimer laser. Information

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LANGUAGE: eng

NlmUniqueID: 7708433

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Country: United States

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MEDLINETA: Opt Lett

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