Carbon containing plasmas play an important role not only in plasma technology but also in thermonuclear fusion research. In order to understand and control the processes taking place in the plasma, the knowledge of the carbon ground state density is of major importance. It can be determined by absorption and emission spectroscopy. Detailed measurements were performed in the past to determine the silicon ground state density by means of spectroscopy of the self-absorbed spectral lines of the silicon ground state multiplet at 251 nm. The same procedure was applied for the determination of the carbon concentration, for which the carbon multiplet at 165 nm was analyzed and compared to a simulated spectrum. The ground state density was determined by two independent methods.
Determination of neutral carbon concentration in electron cyclotron resonance generated plasma discharges. Publishing Authors By Initials
Determination of neutral carbon concentration in electron cyclotron resonance generated plasma discharges. Journal Published:
PUBLICATION TYPE: Journal Article
Journal: The Review of scientific instruments
VOLUME: 78
Page Numbers: 123110
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ISSN: 0034-6748
DAY: 31
MONTH: Dec
YEAR: 2007
Determination of neutral carbon concentration in electron cyclotron resonance generated plasma discharges. Information
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LANGUAGE: eng
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Grant and Affiliation Information for Determination of neutral carbon concentration in electron cyclotron resonance generated plasma discharges.
AFFILIATION: Institut für Plasmaforschung, Universität Stuttgart, 70569 Stuttgart, Germany.
Country: United States
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MEDLINETA: Rev Sci Instrum
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