Correlation of the vector diffraction effect on the optical lithographic image of a binary mask with magnification of the projection system.

Correlation of the vector diffraction effect on the optical lithographic image of a binary mask with magnification of the projection system. Research Abstract Details 

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Correlation of the vector diffraction effect on the optical lithographic image of a binary mask with magnification of the projection system. Abstract Text:

Y Jhun,S Kim,S Lee,H B Chung,H J Yoo,

Correlation of the vector diffraction effect on the optical lithographic image of a binary mask with magnification of the projection system. Publishing Authors By Initials

Y Jhun,S Kim,S Lee,HB Chung,HJ Yoo,

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Correlation of the vector diffraction effect on the optical lithographic image of a binary mask with magnification of the projection system. Journal Published:

PUBLICATION TYPE: Journal Article

Journal: Applied optics

VOLUME: 37

Page Numbers: 2542-9

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ISSN: 0003-6935

DAY: 1

MONTH: May

YEAR: 1998

Correlation of the vector diffraction effect on the optical lithographic image of a binary mask with magnification of the projection system. Information

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LANGUAGE: eng

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Country: United States

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MEDLINETA: Appl Opt

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