Atomic-hydrogen mapping in hot-filament chemical-vapor deposition.

Atomic-hydrogen mapping in hot-filament chemical-vapor deposition. Research Abstract Details 

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Atomic-hydrogen mapping in hot-filament chemical-vapor deposition. Abstract Text:

Two-dimensional maps of the atomic-hydrogen concentration distribution were acquired with two-photon laser-induced fluorescence. The environment was a hot-filament chemical-vapor-deposition reactor used for polycrystalline diamond-film deposition. The maps were measured in situ under diamond-deposition conditions with variation of the growth parameters. The parameters investigated were filament temperature, input methane concentration, and total pressure.

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Atomic-hydrogen mapping in hot-filament chemical-vapor deposition. Journal Published:

PUBLICATION TYPE: Journal Article

Journal: Applied optics

VOLUME: 40

Page Numbers: 765-9

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ISSN: 0003-6935

DAY: 20

MONTH: Feb

YEAR: 2001

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LANGUAGE: eng

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Country: United States

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MEDLINETA: Appl Opt

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