A pyrazolate-based metalorganic tantalum precursor that exhibits high thermal stability and its use in the atomic layer deposition of ta(2)o(5).

A pyrazolate-based metalorganic tantalum precursor that exhibits high thermal stability and its use in the atomic layer deposition of ta(2)o(5). Research Abstract Details 

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A pyrazolate-based metalorganic tantalum precursor that exhibits high thermal stability and its use in the atomic layer deposition of ta(2)o(5). Abstract Text:

Charles L Dezelah,Monika K Wiedmann,Kenichiro Mizohata,Ronald J Baird,Lauri ,Charles H Winter,Charles L Dezelah,Monika K Wiedmann,Kenichiro Mizohata,Ronald J Baird,Lauri ,Charles H Winter,Charles L Dezelah,Monika K Wiedmann,Kenichiro Mizohata,Ronald J Baird,Lauri ,Charles H Winter,

A pyrazolate-based metalorganic tantalum precursor that exhibits high thermal stability and its use in the atomic layer deposition of ta(2)o(5). Publishing Authors By Initials

CL Dezelah,MK Wiedmann,K Mizohata,RJ Baird,L ,CH Winter,CL Dezelah,MK Wiedmann,K Mizohata,RJ Baird,L ,CH Winter,CL Dezelah,MK Wiedmann,K Mizohata,RJ Baird,L ,CH Winter,

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A pyrazolate-based metalorganic tantalum precursor that exhibits high thermal stability and its use in the atomic layer deposition of ta(2)o(5). Journal Published:

PUBLICATION TYPE: Journal Article

Journal: Journal of the American Chemical Society

VOLUME: 129

Page Numbers: 12370-1

Journal Abbreviation: J. Am. Chem. Soc.

ISSN: 0002-7863

DAY: 26

MONTH: 09

YEAR: 2007

A pyrazolate-based metalorganic tantalum precursor that exhibits high thermal stability and its use in the atomic layer deposition of ta(2)o(5). Information

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LANGUAGE: eng

NlmUniqueID: 7503056

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AFFILIATION: Laboratory of Inorganic and Analytical Chemistry, Department of Chemical Technology, Helsinki University of Technology, P.O. Box 6100, FI-02015 Espoo, Finland.

Country: United States

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MEDLINETA: J Am Chem Soc

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