This work presents a new multi-site probe array applied with parylene technology, used for neural prostheses to record high-level cognitive neural signals. Instead of inorganic materials (e.g. silicon dioxide, silicon nitride), the electrodes and conduction traces on probes are insulated by parylene, which is a polymer material with high electrical resistivity, mechanical flexibility, biocompatibility and easy deposition process. As a result, the probes exhibit better electrical and mechanical properties. The all dry process is demonstrated to fabricate these probe arrays with monolithically integrated parylene flexible cables using double-side-polished (DSP) wafers. With the parylene flexible cables, the probes can be easily assembled to a high density 3-D array for chronic implantation.
A new multi-site probe array with monolithically integrated parylene flexible cable for neural prostheses. Publishing Authors By Initials
A new multi-site probe array with monolithically integrated parylene flexible cable for neural prostheses. Journal Published:
PUBLICATION TYPE: Journal Article
Journal: Conference proceedings : ... Annual International
VOLUME: 7
Page Numbers: 7114-7
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ISSN: 1557-170X
DAY: 6
MONTH: 02
YEAR: 2005
A new multi-site probe array with monolithically integrated parylene flexible cable for neural prostheses. Information
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LANGUAGE: eng
NlmUniqueID: 101243413
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Grant and Affiliation Information for A new multi-site probe array with monolithically integrated parylene flexible cable for neural prostheses.
AFFILIATION: Caltech Micromachining Lab, California Institute of Technology, Pasadena, CA 91125 USA (phone: 626-395-2254; fax: 626-584-9104; e-mail: changlin@caltech.edu).
Country: United States
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MEDLINETA: Conf Proc IEEE Eng Med Biol So
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