A low-profile three-dimensional silicon/parylene stimulating electrode array for neural prosthesis applications.

A low-profile three-dimensional silicon/parylene stimulating electrode array for neural prosthesis applications. Research Abstract Details 

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A low-profile three-dimensional silicon/parylene stimulating electrode array for neural prosthesis applications. Abstract Text:

Y Yao,M N Gulari,S Ghimire,J F Hetke,K D Wise,

This paper describes a low-profile three-dimensional silicon/parylene microelectrode array as basis for practical neural prostheses for use in the central nervous system. The circuit areas of the silicon probes, containing mixed-signal CMOS circuitry for neural stimulation/recording, can be folded over to reduce the overall height of the microassembled array above the cortical surface. The low- profile structure is implemented using multiple gold beams spaced by orthogonal silicon braces. An integrated silicon/parylene batch process is introduced to encapsulate these interconnects and achieve high yield.

A low-profile three-dimensional silicon/parylene stimulating electrode array for neural prosthesis applications. Publishing Authors By Initials

Y Yao,MN Gulari,S Ghimire,JF Hetke,KD Wise,

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A low-profile three-dimensional silicon/parylene stimulating electrode array for neural prosthesis applications. Journal Published:

PUBLICATION TYPE: Journal Article

Journal: Conference proceedings : ... Annual International

VOLUME: 2

Page Numbers: 1293-6

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ISSN: 1557-170X

DAY: 6

MONTH: 02

YEAR: 2005

A low-profile three-dimensional silicon/parylene stimulating electrode array for neural prosthesis applications. Information

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LANGUAGE: eng

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AFFILIATION: Member, IEEE, Engineering Research Center for Wireless Integrated MicroSystems, University of Michigan, Ann Arbor, MI 48109-2122 USA.

Country: United States

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