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#1
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| Hi everyone, I am wondering if anyone can provide some insight into why SEM, STM and AFM have better resolution in vertical direction than in lateral direction? Thanks in advance! |
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#2
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| Because their lateral resolution is limited by the accuracy of the mechanism that preforms the scanning action. So while the vertical resolution is limited to the ability of the probe to detect deflection, the planar resolution can be effected by vibration of the scanning mechanism, the accuracy by which the scanning mechanism can be moved, and so forth. Bryan |
| The Following User Says Thank You to Warthaug For This Useful Post: | ||
Sayeh (10-29-2009)
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| lateral , resolution , vertical |
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